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̿Ͱ,ڿܼ(EUV) 뱤 1 ASML EUV Ȱ Z ʹ̼ ݵü (R&D) ü Ǹ 28 LH üߴ.
̴ ȭ ȭð K-ݵü ٽɵ 8 ASML CEO( ũ) ǹڸ ü ġ ߰ ڸ ûϴ ż ڰ ̲ , LH ź ѱ° ⺻ ̴.
4 ASML Ѱλ(ũ ӽɸũ) ȭ New ķ۽(üü Ʈ̴ ) ̾ ASML-Z ü(1 ) Ǹ ȭø ֽ Ϳ ϴ١鼭 ȭ ϴ ASML Ʈ 㰡 ϴ ϰڴ١ ߴ.
̿ ũ ӽɸũ λ ȭ ASML ȭ ķ۽ ȹ Ӱ Ǵ Ϳ ϴ١ ϸ鼭 Zڴ ASML ߿ , ̹ ü Ǹ ϰ ȭ ݵü Ȯ․ȭϴ Ⱑ Ѵ١ ߴ.
Ư, ο ÷ܹݵü(ASTC, ѱ IMEC) ȭ ġ Ź帰١ ٿ.
̳ ȸ ״ δ( ⸵ũ) Բ 輮, ȭô ̹ ״ ݵü پ о߿ Ȯ ִ Ⱑ ϰ ִ.
ȭø ã ASML λ ״ δ 㿡 ȭ Ƹ ȭ ڿ 鿡 ֵ ǥϰ ߴ.
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