赿, 10 27~11 2 κ Ʈơ״ 湮

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  • 2024. 11. 25()
赿, 10 27~11 2 κ Ʈơ״ 湮
  • Է : 2024. 10.27() 14:32
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[α ] 赿 ⵵簡 ̱ ̾ Ʈƿ ״ 湮 ݵü ۷ι ȭ, ÷ܻ ġ ຸ ̾.

⵵ 赿 縦 ǥ ݵü ۷ι ȭ ÷ܻ ġ ̴ 27Ϻ 2ϱ 5 7 ״ ƮƸ 湮Ѵٰ 25 .

15Ϻ 21ϱ 5 7ϰ ̱ 湮 ij ȣ , ۷ Ų Ͼ °踦 ϴ 2 1õ ġ ִ.

״忡 ݵü ̿(ASM) ̿(ASML) 縦 湮 ̴.

1968 ASM ݵü 꿡 ʼ (ALD) 3 8õ Ը ݵü ̴.

ASML 1984 276 (2023 , 40 ) ݵü ٽɰ ϳ 뱤(Lithography) о ݵü 1 ̴. ϰ ÷ ݵü ʼ ڿܼ(EUV) ұ׷(Ǹ ۿ ȸ ϴ ) ϴ.

÷ܻ ۷ι µ ȭѴ. ߼ұ Ʈ 뵿 оߺ Ȯ븦 ϰ, ״ ÷ܻ ߽ 븣ƮƮֿ ű ȣ üѴ.

̿ 3õ ϴ 28 ΰδȸ ȸĿ ڷ ̸ 忡 õ ⵵ ߽ ߹ ȴ.

⵵ ڴ ߽ɿ ġ Ʈƿ λ縦 ⵵ ذ ̸, ״忡 ȭӸ ƴ϶ ÷ ݵü ã ϰڴ١ ̱ 忡 ̾ ǹ ִ ̾ ֵ ϰڴ١ ߴ.
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